Cantilever
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length: 310 µm, thickness: 3.7 µm, width: 30 µm each n-type, highly doped silicon (0.01 ~ 0.025 Ω·cm) |
Tip
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AdvancedTEC™-like
tip radius: <15 nm, tip height: 28 µm
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Force constant
|
5 N/m (Si cantilever part)
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Tuning fork prongs
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tTF= 124 μm, wTF= 214 μm
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Resonance frequency
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33 – 60 kHz
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The images below show a NANOSENSORS™ original ceramic plate for Akiyama-Probe with two gold contacts and three through holes. All through holes have the same size and can be used for centering the plate on a counterpart that has three spheres.
The thickness is approximately 0.4 mm.